Accelerometers

Model Number

KXE00 Series

APPLICATIONS

• Motion Detection/Monitoring
  
• Vibration Detection/Monitoring
• Vehicle Active Suspension Systems
  
• Vehicle Crash Detection
  
• Engine Misfire Detection

PROPRIETARY TECHNOLOGY

These high-performance silicon micromachined linear accelerometers and inclinometers consists
of a sensor element and an ASIC packaged in a standard 16-pin SOIC wide-body package. The
sensor element is fabricated from single-crystal silicon with proprietary Deep Reactive Ion Etching
(DRIE) processes, and is protected from the environment by a hermetically-sealed silicon cap
wafer at the wafer level.
The KXE00 series is designed to provide a high signal-to-noise ratio with excellent performance
over temperature. Sensitivity is factory programmable allowing customization for applications requiring ±10.0g to ±40.0g ranges. Sensor bandwidth is user-definable.
The sensor element functions on the principle of differential capacitance. Acceleration causes displacement of a silicon structure resulting in a change in capacitance. An ASIC, using a standard CMOS manufacturing process, detects and transforms changes in capacitance into an analog output voltage, which is proportional to acceleration. The sense element design utilizes common mode cancellation to decrease errors from process variation and environmental stress.